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AFM Lithography by Local Probe Oxidation

 

AFM nanolithography image obtained by electrical local probe oxidation technique on GaAs surface. 
 


afm_nanolithography_image_obtained_by_electrical_local_probe_oxidation_technique_on_gaas_surface
afm_nanolithography_image_obtained_by_electrical_local_probe_oxidation_technique_on_gaas_surface
AFM Lithography by Local Probe Oxidation

 

AFM nanolithography image obtained by electrical local probe oxidation technique on GaAs surface. 
 


size: 4.4x5.2 um
SPM principle: AFM Oxidation Lithography
LAO Nanolithography
AFM Lithography by Local Probe Oxidation
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