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AFM Lithography by Local Probe Oxidation

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AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film.


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AFM Lithography by Local Probe Oxidation

AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film.


size: 4.6x4.6 um
SPM principle: AFM Oxidation Lithography
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