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LAO Nanolithography

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LAO Nanolithography was made on Ti film in Semicontact mode.


ml
ml
LAO Nanolithography

LAO Nanolithography was made on Ti film in Semicontact mode.


size: 8x8 um
SPM principle: Intermittent contact mode
LAO Nanolithography
AFM Lithography by Local Probe Oxidation
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