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LAO Nanolithography

Portrait of Marilyn Monroe. Nanolithography was made on Ti film in Semicontact mode by means of Local Anodic Oxidation (LAO).


merbig_n300
merbig_n300
LAO Nanolithography
Image by Dr. S. Leesment
size: 7x11x0.002 um
SPM principle: AFM Oxidation Lithography
LAO Nanolithography
AFM Lithography by Local Probe Oxidation
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