AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film on silicon wafer. NTEGRA Aura with DCP11 probe was used.
AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film on silicon wafer. NTEGRA Aura with DCP11 probe was used.
AFM nanolithography image obtained by electrical local probe oxidation technique on ultrathin titanium film on silicon wafer. NTEGRA Aura with DCP11 probe was used.