{c} 1998, NT-MDT +3/H@H@Ed*@ E<1?8,)d=Hz@@@@?BC{B#I=Cff$B?2JL+:6/ "l!H(ls}UqW?ui=h-_@$,s+*<0J6[W PK$HnO@ x0#NL::V{{)qH+?N)ww?iU;BB@gw<0ZH~Fx@\NbVj)q+ T[T#>>>|BB,gY1@F_B_Lm ~K bbZ`0?+++)T) ;>'B^T< gYY+0cfJ::@@'6"d ~~q#^Ktjt Zaa-0?P] &TH2 >1/^TTQ m0chJ 1 fdd%x ~taa6 zu &G9z&TTrSFRa4""c"9@3a""iiD%BHjjh[\x : ~6 uu+C+{991Dz\/rSF#^rk"u"9@33:aiD%!ZV;s((N:$ DVgug" 3/+X\:{z{4Dz333#RU22246syn.oD +Z V =THH4 $$$DVgug& 3/Gtt2zkzD13l5%cuU2PQ64]vnI.o +V   V! 46 $$b@@@4. 99&XBGZ;k]YDnnnI&&:|5"",.}bbb%QQQopIp2]f {{_gglSG44 bb@4 X?= --Y!P+mA&~:ls5.\i_W` 3CXX`8fUk{llL4Scc@,PBB/YY-;; m-222p~]"X\iW`v !X`GZfUkrlll`!S9/uFDxYZZ&E;: >yoKKK13F3x!g[7//?zzT= . `XX|7~$++Hx^A,ZQNg;%FW_7"JYx777K3^^E z=``qqK770u=f tc'#`X/m!oBO-HwwQa44DQmJJ9. a^=w}d0`m44^r-36V"mzw'&#c/`!J 'pO-Hyy\;;;32)FmAG9.kamm==wzzdL2LjiF~vmF'=LMmm!J 'Ip`1 Ogg\F RDDQ<<vv9Ny?>^m>hAG]G\cww```jMWiWF>#)%2myp(wvI===ttD#*_g1 Omm`*3a4Ncozzy_Vq2H#%AG]PP\bbM,%(( kyy%L)2mpp(+v=i`IgMQmme`,..LhLQ coyQ#%'$1P\ug,%%5,,(jaakGG^I7;GGC+bv44.`##`gQ,``H ,ZI.LLv $TR,  5,,ijj\LA%F^WGPOC8247,TWDWXitG,7j}H 9Z.)Us$&Q%5 TUUTz&&*xCCCIC8e3777@00(?~_7 ?j}YUU sWf%5 !Tu554T}}qecGyBAuKJI8tt 6VGG*)h73(?~V j}ePUU +k!V}}TTn~55-ep^u2M7edM;;<<VGG-*4Hn7Z`3gq_RSeeeE][]3 HjvvY?v}}/huuuuuT|A\$5CN^^M { Wd\I69242_H]nZ`GRRR&Se}>]3r ggjKjvvY?wvV$5MuAA\$88)]lYWt {Ibw >W& 22JJJ*RR.^}i>E~gA||CCCGewwjHF&&IIv5u#44G:lll`e|Ulxtxw#0?i9nnn:JZ* ]k]0Ai>gA<<RbpeTegK BNWWwb#q>11Wl"TUx#@@0?isU>ssmHJZZ5kqAnnfffbbppTF$,ThNKKbmc_>>X{]]*uu#\\iKU>:nsfH*556yl2=nnX(*A{nnRM9(!$,zzJVVMXXXXhMF]um}VvPY: ffaa5FTqp4=iniI9;C{nn6%)Wzs jXXL;cmRR,} "YFTllU4=Iigf=1 8Chh6)%()Azv``IeseU6 jTTdkYL@;66$o*\33sP2 "YmFL00 ^YUg1 ?MMM)%%nnv).)4QeU6ukO(FFF@@pycZ~E*J57]ms{ua"AQQ'BB0 !!88KMllllZnnN#))4Rmeb;%^O( QYYpyv|VhCJ]V;Uqsuuao::.B Gk|rZJ)4JmaT^q||{yhVY+J]877vmao..GG>IlJ g/Tq^P]P]t||"m?`KmQ0+0s{Z Joc:6.__??>AEE2BI` |)6/xqO]y|NNuYKQBA#PeUgQ+pr{rN ,<::666>>Ac7II]]86]9Lrs x/P}Q00**Ng U@KQBA;PU~[Q+pr^6ooGYzsc# ''1 jjjj]]]N\ru<<;'/e}Q! *af|'3BMMPP x  C1]?rycFGY`Scoon#*NjjjKK888 jNj 'Dep9&640*:aJE\GeeMaj! F!eJ\y%^bK>YssS $c#--19IRRRN( Bvu9y|y|)U\|+am!>>W/z]\y,(*6K6;SS$o:-`uY9IRNN(5Eyp//&26r;Yo WDFF?RW,9n]+X,(066&$$$&ujj:JLL`uY]]q&&&&&&+r|( 2Tr~~D; +vDaqqfQVn]HXfZ,00 'Js$Buuj1:JL wy,]]]02moorrgProT* ++RRWFQC9`KQZQ0CJs]]%&S88fhy%,-__oo8Prro*RRQ2C&&bb\QZTCneF]]^^<SrN %%%]_ddmE.8A8qRvmCSirTAne& &F]q`%lr* ''ff4@Lh-]__E/} IY<<<]]K=`VViSi~ToT LhL Z`ge']W4RRl`fsW88VDd?N !!phvbb{iK|1hhAShhP`c5Jex- 4L6PRRUU555<`k8//4)D' !&&&b|RKOO1h{h `hh@7Pc38gh`x_*666"gQ22>__}hyQ <w&&FXnT :FAG) ??!IRReqI}E ##gDw >>tkwPi_oQ::5<Fwkww%FTT 0AA$ Y))5^{b?!'TRRJRRR{}}xww5Wq7s%YoywoM..GzmmoJ8DuV 6$ Y9EQ{b? 'TRJ'xxw5^^^7VsYowtt  ><<GzmoJFDVVD$$:wp:9Q='|m##5W @ Y-B##ot >77PoouD DVrYwJ:9==oljs... |####2@,-UFF3(3y ) ~yx77PQ||kPouDqeew:)*[lPPXj`B. Af5\\lFRF#(i  ~m;yO.)4AAkikU\U}PP=7**=[ 3ZZKo[P[ tB~6``o5T[[St~x> *mO 9i OU\UM}Pmq.@@=Yp=**U 3ZZK}xmMee\@@E``L33i~D6`l5u~~vK*1mHHuHOUUM9@aa[Y8!79N"FZVF_MMM@@E- 33p5`V_j~rg7dbu~qv-7Dg-,U#puu][p8!8!FF"DQw155paO`lV_j'rz7dxq-,7+p%2#`/8]]8 TTF1DQw{{r*k_S??OzI8dxx{{m[Ki+" ##JJ%/ YYT\Mqppp{{*Caa" {Nhrb$fZY~e~}m93L),AT[%sz2#XXR\M1kkk^+_" x;;hI f8v!#/)Mcc{m33L) .}A:T?:z: ##;MZrZ|y[XkppifdC<<<woHJ7\,WP_w#E#KK)c3c}LFLV HuQQQ-???:: TZrZ}y}ywoAAidddk>WwD)O__w/K2/-3yF?FV H}}`N(,,676**~  TW5Gp===>AGG1)TtkUQ---w?dkkM JuuuQQN5A@ .8TT5zhh%,,:={AGG1>WGfaa~pUFFlQKw_MkH! N~I 7NNN5*ZP, 84.0M77,qq``deKRK:,:ygsssu Ma,~U]ddzzlooowk|0DJmYYh606Z[PA %%Z4.4M77"smZZ:KDKKRK%A_t{+rcVcpsKb Mx,:Bp{dTTGbz?ioi1|aDC`mppcckukF,,>Z140-__h:GsmqmGG#@MRPP_tt{+ymOOs!!. /fxPzdTSziooj||aXD66p&&kF;%11=]:,GF+($$FM*WWPPA+n`rrOWWW! i EfRPRmQ**/-,-iojHXSC3'>:::BBBhh'++3e**WWW8nU]`WW n =EfzRHHHS>/_N"jjHKK E|<:u}mHrrBI4399***w'')==eeeRHE==QQr! %%%v |z:2TxHTrr&||x84]99 &d'EuQ{O66brb >P  }}zP2ffTTqq&~44]~RRR &&0. .n%PQao;'@~rb >oos l5 Qb11:ffETE esttt~~~+,,-8H&&& gOOO. ]?Ezaao@@d~u>>oo u  l Q}1^f qq: Fhhti+,8H &&--OOODFHPzD(aaopip''u>ov*W& +1^^"ff,Fy8 LUu }j}-::Ar(KV||((a> ,iud.Ywa&],++^(Tfd I~#v~p}}}$$$-2-}E|tW\wVh00sc3uYFY{|PP]uOC<)TT4"rKPuQ@''=v]HHS$$$WZZeo?xx8(3cH%rnF&#Y|mavu&5<5,)(TT\Mr rQQQ@*zz 88SZKuoDxxF%%9re&IZ|zz!35ofTTTkEM ))rS7* *}zax000 t288)R&jaoX0HfA``nfvzxx3P^of2\d\EPEOW'7* D+Akkz000{22pFy:+^^^ooXMlllnnfff3P^^^2-`dg\TPE $LWN='yVED+kj5}bWi:qS^^XXXEMleK.n> ''2wlj(]aP>$LYYW='jyjy{sse:q^Z#?s50<.>>>>@AD9(A]]'LLLHHGG11'b"Gps &OfRooeFeiSKZo4E77Ts_*xddy0w_@A9C(PYY '>>&11'mR:Yu{y &OHRooeFF9sVZI;0wz9C``Yjj> &&\\\RRYu(((kGyoEE((sV>>>heI=..;|R6))ww### 6yY3A> s_D33!!!nLDLD\ex(((b=#=#PL!hheeL?|u6???1)Xhh [kM33j Us_D33!!!rD%%NUeeb====$$BRWW[[TTAO]`  @,@[u[(""*qh^??16[hhh!6kM@@jj;DXs|J 66xxwxsCs 777P[ Y!+  |@[ufuf\yysh^=u7{b&[%uj{aa-''66u:6EVVs iinz9=2Y+ww]]\\+)[uays^uu6T{bKb{D-bb^5r?;6w;;; FAL**7Q"72|I+x8#RA&1<<0K.'"auu+OSKKbbu_??/44;;;GNCDgnnQQ|C]xC #.aABW11<0-p f|laOcc\SKXXmm/44vd->DvB )k|C'*]QAMMW&-p.fff}uuJeee\FZ<Cv[!)/fBKKHx'jfffJ))AFMMMR/gpgQQQu}ELeeecZZv,,,qqnyyy&-..1Ce<!s5;@pyg g]ANJJJQQF[[[!Wccc/424\aQ}?J?=b``+/1,,h@@@e (;;=bcCCW/!r5yg&y3b7>>>JNm#=KlE=EEAA\\TTD1 +/1pll "Dp ppN==bb* OWs/Yf75 pb hH--7>>33y>*XXlEBFF522!5WW*TTDmZZCCC .j'Lf;;bb" QllKcd} x ~VE- Bw33y<<TgggM.7FmF5 5WW* yyyPF$$?CJQ.6j'LVN*QQHd}x@~omHHHw!EA.'7Xll5 g@PF#Qx8jKKV9+MM4 aHccc''/nx~RmuYYH#%]nnT'7IIXR9 !6b6g:"## ] $59MM"oo-/SSnKEHF0 XXYbC/7iwicXR$M\\n6[#::PovSU$yy++f"/ 2<pnnxEAAM]?! __A(Aiwic*MMW\\b[HHy\\w$5'ffa 2""Q/ <<^SIIZbKg X65 A_eeR)W\\M !! [/a-ww77`[%'ff" 2 !IIccn<^^^4CIs Xlu5 OO33OO.W\2  Q!! ww-S!!!*C\\`_VL%( DaD2!II|4-cccnW8)/[ 'XlllLKK+"" ^;aa...&povvO66StJ##-cG 6e||NN F( \aT!I--ccCy'/YY''##xpx;cdhh`.&~~^p^Qxx(J##4WG_|`NN F1dd%%_aTbb MMy]'YRLppp;cdhh`jjp^u==<*Yt##4RL((_8E83]]\\bbHOx?agR/kxh>jjn``c<(8d#WkU+L EE1>3yyKK~r(:WWWZl?a***-Y)IkcBBB'  `c`c-*BxxkL+ aaLh]6)>ccp>KFSGCXXXWW,,<***//bgg))) NBB' ~~k`-,fxO4k.j :cLh])6xxlpbbdFX:2,2,<pW:O<<!bgg 22NNBcmmm**?fl?],%8fz4'4_c||h'6XlcbbbX=GnnX( z[1,pW:::[<H<':rjcM22^VX ~X] Zf{{{B%,,,@@45rU:tcyo$Xxl^JYYd=a-X9Gz[89[-'prM( tqXi ?|a6hhhz$YrrU__3y>>X6^JYt=q9GGK]8(:mYYEEE@(yGGZZ{aBHh*5rr$$5bW3ylRR[NP999F]]dHHK%WWWEEEEE@&<<;0 oOX|',' a*&(((?^#btDAaaa*SNzzBM&QBTJPF:9T1 -u}*@E5Y`;rp(,O&|'_V', |V8&?yW_tDy]a0{za#hW <FrameComment> <TextComment></TextComment> <Parameters> <Nova> <Application>1.0.26.1138</Application> <ElectronicsID>P7</ElectronicsID> <ScanningTime>000:00:38</ScanningTime> <Technique>1</Technique> <SPMMode>6</SPMMode> <ScanningDevice>PiezoTube</ScanningDevice> <ParallelScanning>0</ParallelScanning> <PassCount>1</PassCount> <ScanRatioType>0</ScanRatioType> <XYClosedLoop>false</XYClosedLoop> <SignalID>44</SignalID> </Nova> </Parameters> </FrameComment> ,ъ뢠@4I֤@ AbA@A $A                    !!!"""###$$$$%%%&&&'''(((()))****++,,,,---....//0000 1 1 1 2 2 2 2 3 3 4 4 4 4 5 5 5 6 6 6 6 7 7 8 8 8 8 9 9 9 : : : : ; ; ; ; < < = = = = > > > ? ? ? ? @ @ A A A A B B B C C C C D D E E E E F F F G G G G H H I I I I J J J K K K K L L M M M N N O OOPPPQQRRRSSTTTUVVVWWWXXYYYZZ[[[\\\]^^___```aabbbccdddefffggghhiiijjkkklmmmnnnoopppqqrrrssstuuvvvwwwxxyyyzz{{{|}}}~~~ !!!!!!!!!!""""""""""#########$$$$$$$$$$$%%%%%%%%%%&&&&&'''()))*+++,---./// 0 1 1 1 2 3 3 3 4 5 56678889:::;<<==>>??@@AABBCDDDEFFFGHHHIJJJ K L!L!L"M"N#N#N#O$P$P$P%Q&R&R'S'S'T(T(U(U)V*W*W*W+X+Y,Y-Z-Z-[.[.\.\/]/]0^0^1_1_2`2a2a3a3b4c4c5c5d6e6e6e7f8g8g8g9h9i:i:i:j;kn>o?o@p@p@qAqArArBsBsCtCtDuDvEvEwEwFxGxGyGyHzHzI{I{I|J|K}K~K~L~LMMMNOOOPPQQRRSSSTTTUVVVWWXXXYZZZ[[\\]]^^^__``aabbbccddeefffghhhiijjjklllmmmnnopppqqqrrssttuuuvwwwxxyyyz{{{||}}}~ ȫiWdHecec@@